BEAMeeting MNE 2023 - Berlin, Germany

The 49th International Conference on Micro- and Nano Engineering (MNE) will take place in Berlin in September 2023. Now we are very pleased to announce the traditional BEAMeeting at MNE will be held on Monday, 25th of September, 2023 in Berlin.

      Date:                 September 25, 2023, Time: 09:00 – 12:30 CEST
      Place:              Mercure Hotel MOA Berlin , Germany, Room MOA 4/5

BEAMeetings are a technical exchange platform for the e-Beam and laser lithography direct write community focused on, data-preparation, PEC, process correction, and lithography simulation. The global GenISys team will contribute with updates on new features and interesting cases. User presentations on applications, solutions for specific issues are also welcome and are planned for in the program. Please let us know ( if you would like to present a particular subject which would be of interest to the Beamer/LAB/ProSEM community.


REGISTRATION for MNE Berlin BEAMeeting 2023 On-Site
REGISTRATION for MNE Berlin BEAMeeting 2023 Online

After the morning BEAMeeting, we have another workshop in the same meeting room in the afternoon - “Maskless Laser Lithography for the Advanced Micro- and Nanofabrication”. It is a joint event organized by Heidelberg Instruments (HIMT), micro resist technology and GenISys. You are also welcome to participant in this workshop. Please visit the details on the website: Maskless Laser Lithography for the Advanced Micro- and Nanofabrication


Our BEAMeetings are an open technical exchange between users and GenISys. Your contributions and presentations of applications, challenges, and ideas make them so valuable. To support the next generation of lithographers and nanofabricators, GenISys awards Contributor Prizes to students (BA, MSc, PhD) for the best invited BEAMeeting talk:

  1. MNE conference visit including ticket, hotel and travel.
  2. Pizza feast 200€ - GenISys will cover Pizza or other food and drinks delivered for your research group/team to have a nice get-together.
  3. Book money contribution 100€ - GenISys will support you in buying literature or other research materials.

The BEAMeeting is free of charge. Coffee/drinks/snacks are included.

We will be very pleased to receive your requests and suggestions to make the BEAMeeting the most interesting and rewarding event for the BEAMER community. You are also welcome to forward this information to your colleagues who may be interested to join.

BEAMeeting MNE Berlin 2023 - Agenda

BEAMeeting_MNE_Berlin_2023_FinalAgenda.pdf (265.7 KiB)

More details will follow later, please stay tuned to our website and follow GenISys LinkedIn.

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