Part 4 – Standard Dose PEC - Intro
Summary of the webinar:
Standard Dose PEC – Introduction
- Proximity Effect – 01:03 min
- Principle – electron scattering results in CD dependency on dose and pattern density
- Monte Carlo Simulation in TRACER to mimic electron scattering
- Proximity Effect Correction by Dose modulation – 14:04 min
- Edge Equalization algorithm is applied in dose PEC
- Simulation comparing with and without correction
- Inside the PEC window – 20:06 min
- Why divide into Short and Long range corrections – Computationally treated differently
- Effective Blur – sources of origin
- Short-range correction – when is it required?
- Base dose determination