Part 4 – Standard Dose PEC - Intro

Summary of the webinar:

Standard Dose PEC – Introduction

  • Proximity Effect – 01:03 min
    • Principle – electron scattering results in CD dependency on dose and pattern density
    • Monte Carlo Simulation in TRACER to mimic electron scattering
  • Proximity Effect Correction by Dose modulation – 14:04 min
    • Edge Equalization algorithm is applied in dose PEC
    • Simulation comparing with and without correction
  • Inside the PEC window – 20:06 min
    • Why divide into Short and Long range corrections – Computationally treated differently
    • Effective Blur – sources of origin
    • Short-range correction – when is it required?
    • Base dose determination