Integrated SEM Metrology

and Inspection

In SEM metrology for nanofabrication, there is an increasing demand for sophisticated and automated approaches while maintaining versatility.

InSPEC offers an advanced solution for upgrading a SEM into an integrated tool for metrology and inspection.

Enable

your SEM for dedicated metrology
integration while keeping versatility

Increase

SEM utilization and productivity
metrology data and results output

Improve

data quality and consistency
control over processes and devices

Advance

multi-chip large area monitoring
modular metrology and evaluation jobs

Setup and Main Features

InSPEC is integrated with the SEM tool using a combination of digital and analog interfaces.

It consists of

Dedicated software suite
PC and monitor
Hardware unit for scanning and I/O
SEM interface specific cables
Offline software licenses

The workflow is along five main modes for global and local definitions, direct SEM tool control, job execution, and results review or tuning. Representations of this are given in the short introduction movie below and the five pictures.